Tegal Announces Sale of Nanolayer Deposition Patent Portfolio
30 Diciembre 2011 - 6:01AM
Business Wire
Tegal Corporation (NASDAQ:TGAL) today announced that it
has awarded patents to multiple bidders for three of the four bid
lots of Tegal’s NLD Patent Portfolio recently offered for sale for
an aggregate consideration of approximately $4M. To date,
approximately $3.6M has been received.
Tegal sold over 30 patents from the NLD portfolio—which includes
more than 35 U.S. and international patents in the areas of
pulsed-chemical vapor deposition (CVD), plasma-enhanced
atomic-layer deposition (ALD) and NLD. NLD is a process technology
that bridges the gap between high throughput, non-conformal
chemical vapor deposition and lower throughput, highly conformal
atomic layer deposition (ALD). Tegal offered the patent portfolio
for sale earlier this year in an effort to complete the divestment
of its semiconductor capital equipment assets.
In March 2010, Tegal sold its legacy thin-film etch and physical
vapor deposition (PVD) product lines to OEM Group, Inc. of Gilbert
AZ, and in February of this year, sold its deep reactive ion etch
(DRIE) assets to SPTS of Newport, Wales, UK.
The company reports that discussions are ongoing for placement
of Lot 4 of the portfolio, which applies to copper barrier and
low-k dielectric technology. “Interest in Lot 4 is coming primarily
from IC device manufacturers, reports Robert Ditizio, Tegal’s Chief
Technologist, whereas interest in Lots 1 through 3 was driven
largely by equipment manufacturers.” Additional information about
Lot 4 can be found on the Tegal website at www.tegal.com.
About Tegal
Since its founding in 1972, Tegal Corporation has been dedicated
to the development and application of emerging technologies. Often
on the forefront of major inventions, Tegal’s process and capital
equipment know-how enabled the development and manufacturing of
leading-edge devices – from early microprocessors to advanced
memory and LEDs, as well as to newest filtering and sensing devices
that are present in the most advanced smart phones. Tegal draws
upon its historic market and technology leadership in
semiconductors and MEMS devices to engage in the promotion of other
emerging technologies, including PV-based solar power generation
and medical diagnostic and therapeutic devices. Tegal is actively
evaluating opportunities for partnerships with diversified
technology-based companies in order to exploit our shared
experience and to enhance our value as a public company. Tegal is
headquartered in Petaluma, California. Please visit us on the web
at www.tegal.com.
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