Rohm and Haas and AIXTRON Announce Installation of VaporStation™ Central Delivery System
19 Marzo 2009 - 7:00AM
Business Wire
Rohm and Haas Electronic Materials (NYSE:ROH) and AIXTRON AG
announced today that a VaporStation� central delivery system has
been installed and is now operational at the AIXTRON Applications
and Demonstration Center.
AIXTRON, a leading manufacturer of metalorganic chemical vapor
deposition (MOCVD) equipment, is using the VaporStation central
delivery system to deliver trimethylgallium (TMGa) to a CRIUS� and
a Planetary MOCVD system. More MOCVD systems are expected to be
connected to the VaporStation central delivery system at its new
location in Aachen, Germany.
The VaporStation central delivery system, developed by Rohm and
Haas, is designed to deliver TMGa and other metalorganic precursors
to multiple MOCVD reactors from a central supply source cabinet
using a high-purity carrier gas. This delivery technology improves
the economy and the safety of the MOCVD process through the
reduction of cylinder changes and handling. It enables
manufacturers of compound semiconductors, such as LEDs, solar cells
and laser diodes, to further reduce production costs. In the case
of the LED industry, the VaporStation central delivery system will
help manufacturers to more quickly reach cost parity with
conventional general lighting production.
"As the market leader for MOCVD equipment, we are constantly
looking for ways to improve the technology and reduce running costs
for our customers" says Johannes Kaeppeler, vice president of
Technology for AIXTRON. "The delivery of TMGa from a central unit
reduces the foot print of our systems, and this is an important
consideration for our customers using expensive clean room
space.
"The performance of the system met with our expectations right
from the first run," Kaeppeler continues. "Without a single
calibration run, gallium nitride (GaN) films made using the central
delivery system could not be distinguished from the films made
using the conventional onboard delivery method."
"Providing a simpler, more efficient alternative for customers
is a top priority for us, and AIXTRON clearly shares this vision of
the future,� said Joe Reiser, general manager for Rohm and Haas
Electronic Materials� Metalorganics business. �Delivery to multiple
reactors using large-scale cylinders with 20 kg or more of content
eliminates a number of costly inefficiencies, such as calibration
runs, cylinder change outs and residual �heels� associated with on
board cylinders. Additionally, the VaporStation central delivery
system significantly increases reactor up time,� explains
Reiser.
The flexibility, control and economy of the VaporStation central
delivery system has appealed to Rohm and Haas Electronic Materials
customers since its debut in 2004, and recent installations at
leading LED and solar cell manufacturers have proven its production
worthiness. The system can deliver a stable MO precursor
concentration at a precisely controlled flow rate to up to 10 MOCVD
reactors from a single 20 kg supply cylinder. The VaporStation
delivery system has shown excellent performance and superior
economy over the traditional on-board MO source approach in which
each MOCVD reactor requires its own cylinder.
About Rohm and Haas Company
Leading the way since 1909, Rohm and Haas is a global pioneer in
the creation and development of innovative technologies and
solutions for the specialty materials industry. The company�s
technologies are found in a wide range of markets including:
Building and Construction, Electronics, Food and Retail, Household
and Personal Care, Industrial Process, Packaging, Paper,
Transportation and Water. Our innovative technologies and solutions
help to improve life everyday, around the world. Based in
Philadelphia, PA, the company generated annual sales of
approximately $8.9 billion in 2007. Visit www.rohmhaas.com for more
information. imagine the possibilities�
About Rohm and Haas Electronic Materials
Rohm and Haas Electronic Materials develops and delivers
innovative material solutions and processes to the electronic and
optoelectronic industries. Focused on the circuit board,
semiconductor manufacturing, advanced packaging, and flat panel
display industries, its products and technologies are integral
elements in electronic devices around the world.
About AIXTRON AG
AIXTRON AG is a leading provider of deposition equipment to the
semiconductor industry. The Company's technology solutions are used
by a diverse range of customers worldwide to build advanced
components for electronic and optoelectronic applications based on
compound, silicon, or organic semiconductor materials and more
recently carbon nanostructures. Such components are used in�display
technology, signal and lighting technology, fiber communication
networks, wireless and cell telephony applications, optical and
electronic data storage, computer technology�as well as a wide
range of other high-tech applications. AIXTRON AG�s securities are
listed on the Frankfurt Stock Exchange and,�in form of�American
Depositary Shares (ADS), on the Global Market of the�NASDAQ Stock
Market, and are included in the TecDAX index, the NASDAQ Composite
Index, the MSCI World Small Cap Index and the Nature Stock Index
(NAI). Founded in 1983, the Company is headquartered in Aachen,
Germany.
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