Tegal Announces Extension of Bid Deadline for Nanolayer Deposition Patent Portfolio
30 Septiembre 2011 - 4:04PM
Business Wire
Tegal Corporation (NASDAQ:TGAL) today announced that bids for
the company’s intellectual property portfolio for Nanolayer
Deposition Technology (NLD™) will be accepted until 5 p.m. PDT on
October 15, 2011. Tegal extended the bid deadline, originally set
for today, after several additional IC and semiconductor equipment
manufacturers expressed interest in the IP portfolio.
NLD™ is a process technology that bridges the gap between high
throughput, non-conformal chemical vapor deposition (CVD) and
highly conformal, low throughput atomic layer deposition (ALD). The
portfolio includes over 35 US and international patents in the
areas of pulsed-CVD, plasma-enhanced ALD, and NLD™.
“The NLD™ technology provides a number of options for meeting
the needs of advanced semiconductor processing technology,
particularly with the drive toward 3D structures,” says Robert
Ditizio, Chief Technologist for Tegal Corporation. “Tegal’s NLD™
portfolio provides technology for extending the life of
conventional CVD process hardware without the need to move
completely to lower-throughput, precursor-limited ALD
processes.”
Additional information about the portfolio is available on
Tegal’s website.
About Tegal
Since its founding in 1972, Tegal Corporation has been dedicated
to the development and application of emerging technologies. Often
on the forefront of major inventions, Tegal’s process and capital
equipment know-how enabled the development and manufacturing of
leading-edge devices – from early microprocessors to advanced
memory and LEDs, as well as to newest filtering and sensing devices
that are present in the most advanced smart phones. Tegal is
currently marketing its substantial NLD™ Intellectual Property
Portfolio (which includes over 35 granted patents and applications)
to interested parties. Through its recent investment in sequel
Power, Tegal is engaged in the promotion of solar power plant
development projects worldwide and other renewable energy projects.
In addition, Tegal is actively evaluating opportunities for
partnerships with other diversified technology-based companies in
order to exploit our shared experience and to enhance our value as
a public company. Tegal is headquartered in Petaluma, California.
Please visit us on the web at www.Tegal.com.
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