Advanced Energy Launches Transformational Plasma Power Control Technology for the Angstrom Era
12 Julio 2023 - 7:00AM
Business Wire
eVerest™ RF generator delivers next-generation pulsing and
high-speed response for sub-2 nm semiconductor nodes
Advanced Energy Industries, Inc. (Nasdaq: AEIS) – a global
leader in highly engineered, precision power conversion,
measurement and control solutions – today launched the next
generation of stable and repeatable precision RF power delivery
systems that enable customers to maximize throughput and yield in
the fabrication of next-generation semiconductors.
This press release features multimedia. View
the full release here:
https://www.businesswire.com/news/home/20230712111236/en/
Advanced Energy Launches Transformational
Plasma Power Control Technology for the Angstrom Era (Photo:
Business Wire)
Engineered to provide the precision plasma control demanded by
Angstrom Era etch and deposition processes, the eVerest™ RF power
generator enables highly configurable, multi-level power pulsing
that can integrate into and improve any existing plasma power
delivery systems. The platform offers output power from 3 to 10 kW
and frequencies from 1 to 60 MHz, and delivers a wide,
high-accuracy pulsing frequency up to 100 kHz. In addition,
high-speed setpoint response, controlled overshoot between
transition states and access to a sophisticated IoT data ecosystem
allow manufacturers to develop advanced, repeatable processes for
sub-2 nm deposition and etch profiles.
“The semiconductor industry’s mission to deliver improved
performance from ever-smaller chips is now taking us into the
Angstrom Era, where increasingly complex 3D structures and
innovative processes have dimensions measured on the atomic scale,”
said Juergen Braun, senior vice president of plasma power products
at Advanced Energy. “Advanced Energy has been at the forefront of
plasma power delivery and control systems for semiconductor
processes for over forty years. This leadership continues with
innovations that address the demands from manufacturers of Angstrom
Era devices for transformational, high-precision plasma control
that increases process window and widens stable operating envelope
to maximize throughput and yield.”
eVerest is a complete RF power delivery system with multiple
options for impedance matching solutions and intelligent
synchronization with other Advanced Energy innovation like the
eVoS™ bias solution, which enables instantaneous or user-defined
transition timing to optimize etch and deposition kinetics.
eVerest’s high-speed RF output response is under 200 µs, with
pulse-state rise/fall times down to under 2 µs. Dynamic control of
multi-level pulsing opens new possibilities for energy regimes and
distributions, while a programmable overshoot ensures reliable
ignition, as well as the ability to reestablish plasma in processes
with longer pulse off states.
When integrated with the PowerInsight by Advanced Energy™ IoT
data ecosystem, eVerest-based solutions give operators access to
high-resolution, high-bandwidth embedded or system-level data. This
data provides actionable insight that supports faster, more
accurate process characterization and troubleshooting. In addition,
it reduces downtime by eliminating the need to access the plasma
chamber for installation of an oscilloscope.
For detailed product information and technical specifications,
visit our website.
About Advanced Energy
Advanced Energy Industries, Inc. (Nasdaq: AEIS) is a global
leader in the design and manufacture of highly engineered,
precision power conversion, measurement and control solutions for
mission-critical applications and processes. Advanced Energy’s
power solutions enable customer innovation in complex applications
for a wide range of industries including semiconductor equipment,
industrial production, medical and life sciences, data center
computing, networking and telecommunications. With engineering
know-how and responsive service and support for customers around
the globe, the company builds collaborative partnerships to meet
technology advances, propels growth of its customers and innovates
the future of power. Advanced Energy has devoted four decades to
perfecting power. It is headquartered in Denver, Colorado, USA.
For more information, visit www.advancedenergy.com.
Advanced Energy | Precision. Power. Performance. Trust.
View source
version on businesswire.com: https://www.businesswire.com/news/home/20230712111236/en/
For press inquiries, contact: Simon Flatt Grand Bridges for
Advanced Energy Industries, Inc. aei@grandbridges.com +1 415 800
4529
Advanced Energy Industries (NASDAQ:AEIS)
Gráfica de Acción Histórica
De Abr 2024 a May 2024
Advanced Energy Industries (NASDAQ:AEIS)
Gráfica de Acción Histórica
De May 2023 a May 2024